Software Technology for Photoelectric conversion element and manufacturing method

CANON KABUSHIKI KAISHA (Tokyo, JP)

Method of making a photoelectric converter element. This includes a step that forms a layer containing organic material and particles on a piece of metal with a photoelectric portion followed by an action that smooths the surface of the layer by dry etching.

1. Field of the Invention

The invention concerns a photoelectric converter element and manufacturing processes for the element.

2. Description of Related Art

Pixel arrays are a part of a photoelectric conversion component that, where photodiodes are organized, comprises regions that are lit and also light-shielded areas. Every light-shielded area is called an optical black region (OB) and is used to generate a signal to be used as a reference to the image sensor. Some regions with light shielding have unevenness on their surfaces. Japanese Patent Laid-Open No. 2012-204402 discloses a technique of creating an uneven surface by etching a region over a light-shielded area simultaneously with the etching of the entire surface of an image sensor to allow the formation of openings in pad portions to allow interconnection. Japanese Patent Laid Open No. 2012-204402, as the surface of the light-shielded area is constructed from the same material used in the microlens portion, it has been difficult to determine the right conditions for etching to create unevenness through etching. The number of steps required to produce unevenness on the surface through etching increases. This includes the making of a resist mask to form a microlens section. This prolongs the etching process.

The present invention can provide a photoelectric conversion element which reduces the influence of the reflection of light by the surface of a layer above the photoelectric conversion element and a method of manufacturing the photoelectricconversion element.

A method of manufacturing an element for converting photoelectric energy according to a particular aspect of the invention comprises the process of forming a layer of organic material composed of particles and then spreads it on a member having a photoelectric portion followed by a step that roughens the surface of the layer with dry etching.

Additional features of the present invention will become apparent from the description below of exemplary embodiments, including the drawings attached.

Click here to view the patent on USPTO website.

 

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