Samsung Display Co., Ltd. (N/A)

Methods of making a mask include creating a mother substrat for the mask that has a primary section and several second parts adjacent to it, forming an absorbing plate on the mask substrate, then forming the photoresist layer on the reflective plates, removing part three of the photoresist that overlaps the plurality second portions using an additional mask and finally removing the fourth part of the reflecting plate that overlaps those plurality second portions by using a laser.

This disclosure relates to a mask and, more specifically to a mask which can emit light coating and to a method for manufacturing the mask.

Organic light emitting devices, which is one of the various kinds of display devices that are that are available, is sought after as a next-generation display device. This is due to its high contrast and broad viewing angle.

An organic light emitting display device may emit visible rays as electrons and holes that are injected into the cathode as well as the anode mix in organic light emitting layer and emit light. There are many ways to form electrodes, organic lights emitting layers and various other layers within an organic light emitting device. For example, in a deposition method one uses a fine-metal mask (FMM) having a predetermined pattern is closely adhered to a surface of the substrate and a material that forms a thin film is deposited onto the substrate by the FMM to form the thin film having the predetermined pattern. That is, to form the desired pattern of a thin film using a deposition technique, a mask having the same size as an organic light emittingdisplay device is utilized.

In recent times, as a display device’s size increases, a large mask with a precise pattern has been designed and is being used. Lasers can be utilized to create a pattern on a mask. It is also able to take off a portion of the mask. Lasers can cause damage to masks that aren’t removed.

The present disclosure discloses an apparatus and method of making the mask capable of preventing scratch to the mask during the time the mask is removed by the laser.

One version of the inventive concept provides an approach to creating an emollient. This involves providing a mask mother substrat with a first section and a plurality second portions that are adjacent to it, forming reflection plates on the mask mothersubstrat, and forming an image resist layer over the reflector plate, then removing a third part of the photoresist layers that overlaps the second portion of the plurality with an additional mask, and then removing the fourth portion of reflecting plate that overlaps the various second portions using laser.

A particular embodiment of the masque auxiliary may include a multiple openings that are overlapping the plurality second portions. The third portion of the photoresist layer that overlaps the plurality second portions can be removed by using an exposure procedure using the auxiliary masque.

A method of removal may be used to remove the third portion that is not covered by the plurality of second parts, and the fourth portion that is covered by the reflecting plate.

In one embodiment, the reflecting plate may reflect light corresponding to the frequency range that is within the wavelength of the laser.

In an embodiment, the reflecting plate may be supplied as a metallic film.

In an embodiment, removing the fourth section of the reflecting plate that overlaps the plurality of second portions and also removing other parts of the photoresist layers that overlap the first portion could be added.

Invar may be used as a mask mother substrate in one way.

A particular embodiment could have a mask mother substrate which is thicker than the reflective plate’s second thickness.

In a particular embodiment, the process of manufacturing a mask may further include the detection of laser reflections by the reflecting plate by an inspection device.

In an embodiment of the inventive concept, a method of manufacturing a mask includes providing a conductive substrate on which a photoresist layer including a plurality of openings is formed, forming a reflective metal layer by performingelectroplating on the conductive substrate overlapping the plurality of openings, forming a mask mother substrate on the reflective metal layer, separating the conductive substrate from the reflective metal layer and the mask mother substrate, andremoving portions of the mask mother substrate that do not overlap the reflective metal layer using a laser.

An embodiment may include a mother substrate which is thicker than the reflecting plate’s second thickness.

A particular embodiment could have reflective metal layers that reflects light within the range of wavelengths for the laser.

A mask is a manifestation of the original idea. It includes an original substrate that has plurality openings that are separated in a plan view , and an absorbing plate that is placed on the mother substrate.

In one form the reflecting plate could be made of a metal film.

In a particular embodiment, a initial thickness of the substrate may be greater than a second thickness of the reflecting plate.

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