IMEC zvw (Leuven, BE)
The technology disclosed generally refers to semiconductor devices , and specifically, to methods for manufacturing semiconductor devices like field-effect transistors (FET).
Description of the related Technology
To offer greater power- and area-efficiency circuit designs new transistor designs are being designed. One form of non-planar field effect transistor (FET) device is the vertical channel FET device.
Vertical channel FET devices (also called VFET devices) include the vertical nanowireor nanosheet-FET (vertical NWFET or NSFET) having gates that are at least partially or entirely, that covers an element of the channel of a vertically oriented nanowireor the nanosheet semiconductor structure.
Due to their vertically oriented channel designs, VFET devices’ gate length may not be affected by linewidth, but rather by the vertical dimension of the gate electrode. Additionally the source and drain parts of avertical transistor device are vertically offset in relation to each other. VFET devices are able to be constructed in large, efficient arrays for these reasons.
Contacting the source/drains is required to create functional circuits. However because of the orientation of the channel structures as well as the vertical displacement of source and drains, connecting the sources below (or drains as the situation is) can be more challenging than the contacting of horizontal channel devices. For VFETs, contact may be based on the provision of vias that are vertical to each source or drain. To permit connections with low resistance, however the vertical vias have to have a minimum cross-section. This can make it challenging to incorporate into the dense arrays.Click here to view the patent on USPTO website.
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There are many types of patents. Knowing the different types of patents is vital to protect your invention. Utility patents are for inventions and processes that are new. Design patents cover ornamental designs. Utility patents are the best because they shield the owner from copycats as well as other competitors. Most often, utility patents are issued to improve or modify existing inventions. Patents issued under utility can be used to improve or modify existing inventions. A process patent will be a way to describe the actions or methods of performing a particular act. A chemical composition will include a combination of components.
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A patent search is the very first step towards obtaining your patent. You can do a google patent search or do a USPTO search. After the patent application has been filed, the item subject to the patent can be referred to as patent-pending and you can locate the patent application online on the public pair. When the patent office has endorsed the application, you are able to do a patent number search to find the issued patent, and your product is now patented. In addition to the USPTO search engine, you can also utilize other search engines such as espacenet as described below. It is possible to seek help from a patent lawyer. Patents granted in the United States are granted by the US trademark and patent office, or the United States patent office. The office also examines trademark applications.
Interested in finding more similar patents? Here are the steps to follow:
1. Create a list of terms to describe your invention based upon the purpose, composition and usage.
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- What are the technical terms and keywords used to describe an invention’s nature? To assist you in finding the right terms, refer to an online dictionary of technical terms.
2. These terms enable you to search for pertinent Cooperative Patent Classifications on the Classification Search Tool. To determine the most suitable classification to your invention, scan the classification’s class Schemes (class schedules). Think about substituting the words you’re using to describe your invention if you fail to find any results in the Classification Text Search with synonyms like the ones you used in step 1.
3. Go through 3. Go over the CPC Classification Definition to verify the relevancy of the CPC classification that you have located. The hyperlink to the CPC classification definition will be given when the classification you have selected contains a blue box with “D” to the left. CPC classification definitions can assist you in determining the classification’s scope so that you can select the most appropriate. Additionally, these definitions can include research tips and other suggestions that could be helpful in further study.
4. Retrieve patent documents with the CPC classification from the Patents Full-Text and Image Database. You can look through and find the most relevant patent publications by focussing first on abstract and representative drawings.
5. This list of patent publication is the most appropriate to look at for any similarities with your invention. Pay attention to the claims and specification. Consult the applicant and patent examiner to obtain additional patents.
6. You can retrieve patent applications published in the public domain that fit the CPC classification you selected in Step 3. The same search strategy can be employed as Step 4. You can narrow your search results to find the most pertinent patent applications by reading the abstracts and drawings on each page. After that, take a close look at the patent applications that have been published with particular attention paid to the claims and additional drawings.
7. Find additional US patent publications using keyword searches in PatFT and AppFT databases, classification search of non-U.S. patents per below, and searching for non-patent publications of inventions with web search engines. For example:
- Add keywords to your search. Keyword searches may turn up documents that are not well-categorized or have missed classifications during Step 2. For example, US patent examiners often supplement their classification searches with keyword searches. Think about the use of technical engineering terminology rather than everyday words.
- Search for foreign patents using the CPC classification. Then, re-run the search using international patent office search engines such as Espacenet, the European Patent Office’s worldwide patent publication database of over 130 million patent publications. Other national databases include:
- European Patent Office (EPO) provides esp@cenet to access a network of Europe’s patent databases with access to machine translation of European patents.
- Japan Patent Office (JPO) – with access to machine translations of Japanese patents.
- World Intellectual Property Organization (WIPO) offers PATENTSCOPE with a full-text search of published international patent applications and machine translations for some documents, as well as a list of international patent databases.
- Korean Intellectual Property Rights Information Service (KIPRIS)
- State Intellectual Property Office (SIPO) with machine translation of Chinese patents.
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- Search non-patent literature. Inventions can be made public in many non-patent publications. It is recommended that you search journals, books, websites, technical catalogs, conference proceedings, and other print and electronic publications.
To review your search, you can hire a registered patent attorney to assist. A preliminary search will help one better prepare to talk about their invention and other related inventions with a professional patent attorney. In addition, the attorney will not spend too much time or money on patenting basics.